supply, installation and commissioning of atomic layer deposition system as per technical specifications at annexure 11 of tender document supply, installation and commissioning of atomic layer deposition system as per technical specifications at annexure 11 of tender document , supply, installation and commissioning of atomic layer deposition system as per technical specificationsannexure 11 of tender document , supply, installation and commissioning of atomic layer deposition systemas per technical specifications at serial i of annexure 11 of tender document , optional 1 : plasma enhanced mode as per tecnhnical specification at serial 3 of annexure 11 of tender document , optional 2 : 1 additional precursor many-fold equippedwith high-speed valve-controlled precursor ports as per tecnhnical specification at serial 6 of annexure 11 of tender document , optional 3: heating jacket for the precursor bottlesas per tecnhnical specification at serial 6 of annexure 11 of tender document , optional 4 : metrology as per tecnhnical specification at serial 10 of annexure 11 of tender document , optional 5 :extended warranty for three years as per tecnhnical specification at serial 17 of annexure 11 of tender document