supply, installation and commissioning of atomic layer deposition system , supply, installation and commissioning of atomic layer deposition system(refer annexure 11 technical specifications) , supply, installation and commissioning of atomic layer deposition system (refer annexure 11 technical specifications) , optional 1 : two years warranty after the expiration of the standard warranty(as per technical specifications at annexure 11) , optional 2 :other accessories (any other accessories such as chiulled water supply need to be mentioned). technicaly details to be provided in the technical bid (as per technical specifications at annexure 11) , optional 3 :other accessories(any other accessories such as chiulled water supply need to be mentioned). technicaly details to be provided in the technical bid (as per technical specifications at annexure 11) , optional 4 : precursor bottles and lines o2, for other materials such as hfo2, tio2, zno etc(as per technical specifications at annexure 11) , optional5 :refilling of the al2o3 precursor once a year for three-year duration(as per technical specifications at annexure 11)