supply, installation and commissioning of electron beam evaporating system , supply, installation and commissioning of electron beam evaporating system ( refer annexure 11 technical specifications ) , supply, installation and commissioning of electron beam evaporating system ( refer annexure 11 technical specifications ) , optional 1: gas injection: fine control needle valves for admittance of gas into the vacuum chamber including ss gas feeding lines , optional 2: mass flow controller ( mfc ) for gas delivery system: mfc calibrated for argon and oxygen forflow range of 0 – 100 sccm with digital display and controller , optional 3: ion source: gridless ion source for in-situ cleaning and low energy etching. capability to operate with multiple gasses e.g. ar, n2, o2 etc. gas injection and control facility. compatible power supply and controller , optional 4: chamber baking facility , optional 5: extended warranty: comprehensive warranty quote on per year basis for 1st year , optional 6: extended warranty: comprehensive warranty quote on per year basis for 2nd year , optional 7: extended warranty: comprehensive warranty quote on per year basis for 3rd year , optional 8: extended warranty: comprehensive warranty quote on per year basis for 4th year , optional 9: extended warranty: comprehensive warranty quote on per year basis for 5th year , optional 10 : accessories chamber and electronics spare part kit including gaskets, fuses etc , optional 11 : accessories o-rings / gaskets , optional 12 : accessories crucibles for ebeam + liners , optional 13:accessories boats and filaments for thermal evaporation ( compatible tungsten helicals, tungsten baskets, molybdenum boats etc ) , optional 14 : accessories other necessary spares and consumables for items at optional 1 , optional 14 : accessories other necessary spares and consumables for items at optional 2 , optional 15 : accessories other necessary spares and consumables for items at optional 3