Name of Work:- Supply of automation mechanisms to the shutter and substrate rotation assemblies of Magnetron Sputtering system
Sl. No.
Item Description
1
Shutter assembly for magnetron sputter sources(Through 16 CF interface)
2
Shutter assembly for magnetron sputter sources(Through 16 KF interface)
3
Shutter assembly for substrate holder (Through 16 CF interface)
4
Modification in Rotation assembly for substrate holder (Through 25 CF interface)
5
Complete automation system with required software, hardware and accessories for the operation of shutters and substrate rotation as per specification Please Enable Macros to View BoQ information
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