Model Code: SLA5850-S-1B-A-F-1-C-2-A-1 Meter Specifications Meter Range: 3 sccm to 50 SLPM. Material of Construction: 316LSS (Wetted parts) Max Pressure: 100 Bar Max Temperature: 0-65 ºc Accuracy +/- 0.9% of rate (20% to 100%FS) Fluid CO2
2
Model Code: SLA5850-S-1B-A-B-1-C-2-A-1 Meter Range: 3 sccm to 50 SLPM. Material of Construction: 316LSS (Wetted parts) Max Pressure: 100 Bar Max Temperature: 0-65 ºc Accuracy: +/- 0.9% of rate (20% to 100%FS) Fluid O2
3
Model Code: SLA5850-S-1B-A-B-1-C-2-A-1 Meter Range: 3 sccm to 50 SLPM. Material of Construction: 316LSS (Wetted parts) Max Pressure : 100 Bar Max Temperature : 0-65 ºc Accuracy : +/- 0.9% of rate (20% to 100%FS) Fluid CH4
4
Model Code: SLA5850-S-1B-A-B-1-C-2-A-1 Meter Specifications Meter Range: 3 sccm to 50 SLPM. Material of Construction: 316LSS (Wetted parts) Max Pressure: 100 Bar Max Temperature: 0-65 ºc Accuracy: +/- 0.9% of rate (20% to 100%FS) Fluid N2
5
Model Code: SLA5850-S-1B-A-B-1-C-2-A-1 Meter Specifications Meter Range: 3 sccm to 50 SLPM. Material of Construction: 316LSS (Wetted parts) Max Pressure: 100 Bar Max Temperature: 0-65 ºc Accuracy: +/- 0.9% of rate (20% to 100%FS) Fluid H2
6
Model Code: SLA5850-S-1B-A-B-1-C-2-A-1 Meter Specifications Meter Range: 3 sccm to 50 SLPM. Material of Construction: 316LSS (Wetted parts) Max Pressure: 100 Bar Max Temperature: 0-65 ºc Accuracy: +/- 0.9% of rate (20% to 100%FS) Fluid He
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