Name of Work:Supply, Installation and commissioning of Electron Beam Evaporating System
Sl. No.
Item Description
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Supply, Installation and commissioning of Electron Beam Evaporating System (refer Annexure 11 Technical Specifications)
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Supply, Installation and commissioning of Electron Beam Evaporating System (refer Annexure 11 Technical Specifications)
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Optional 1: Gas Injection: Fine control needle valves for admittance of gas into the vacuum chamber including SS gas feeding lines
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Optional 2: Mass flow controller (MFC) for gas delivery system: MFC calibrated for Argon and Oxygen forflow range of 0 – 100 sccm with digital display and controller
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Optional 3: Ion Source: Gridless ion source for in-situ cleaning and low energy etching. Capability to operate with multiple gasses e.g. Ar, N2, O2 etc. Gas injection and control facility. Compatible power supply and controller
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Optional 4: Chamber baking facility
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Optional 5: Extended Warranty: Comprehensive warranty Quote on per year basis for 1st year
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Optional 6: Extended Warranty: Comprehensive warranty Quote on per year basis for 2nd year
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Optional 7: Extended Warranty: Comprehensive warranty Quote on per year basis for 3rd year
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Optional 8: Extended Warranty: Comprehensive warranty Quote on per year basis for 4th year
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Optional 9: Extended Warranty: Comprehensive warranty Quote on per year basis for 5th year
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Optional 10 : Accessories Chamber and electronics spare part kit including gaskets, fuses etc
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Optional 11 : Accessories O-rings/gaskets
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Optional 12 : Accessories Crucibles for ebeam + liners
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Optional 13:Accessories Boats and Filaments for thermal evaporation (compatible Tungsten helicals, Tungsten baskets, Molybdenum boats etc)
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Optional 14 : Accessories Other necessary spares and consumables for items at optional 1
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Optional 14 : Accessories Other necessary spares and consumables for items at optional 2
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Optional 15 : Accessories Other necessary spares and consumables for items at optional 3
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