Large Area Sputter Coating Unit Components Large Area Sputter Coating Unit Components , Large Area Sputter Coating Unit Components , Ultra-High Vacuum Compatible Sputter Magnetron Sources ( A ) Cf-Based Flange Of Appropriate Size To Accommodate 2” Mag, Iit Delhi, Hauz Khas, New Delhi-Delhi

TDR : 29050804

Tender Notice
BOQ

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Iit Delhi, Hauz Khas, New Delhi , Delhi

Tender Brief : Large Area Sputter Coating Unit Components Large Area Sputter Coating Unit Components , Large Area Sputter Coating Unit Components , Ultra-High Vacuum Compatible Sputter Magnetron Sources ( A ) Cf-Based Flange Of Appropriate Size To Accommodate 2” Mag

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Submission Date
29-09-2021

Competition Type
Indian

Bidding Type
Tender

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1	Large area Sputter coating unit components
2	Ultra-High Vacuum Compatible Sputter Magnetron Sources (a) CF-based flange of appropriate size to accommodate 2” magnetron,
3	Ultra-High Vacuum Compatible Sputter Magnetron Sources (b) CF-based flange of appropriate size to accommodate 3” magnetron ,
4	Ultra-High Vacuum Compatible Sputter Magnetron Sources(c) CF-based cluster flange of appropriate size to accommodate 6” dia. magnetron sources
5	Gate Valves: (a) CF-63/2.5\" dia Flange size,
6	Gate Valves: (b) CF-100/4\" dia flange size,
7	Gate Valves: (c) CF-200/8\" dia flange size
8	Deposition chamber pressure measuring system
9	RF Generator and Matching Network of power rating ³1000 Watts @13.56 MHz
10	Pulsed DC Supplies of power rating ³750 W
11	3 Mass Flow Controllers
12	Turbo-molecular pump
13	Film thickness monitor
14	4-pocket and 4 cc electron beam evaporation source with Tetrode tube based power supply 6 kW and having digital sweep

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Large Area Sputter Coating Unit Components Large Area Sputter Coating Unit Components , Large Area Sputter Coating Unit Components , Ultra-High Vacuum Compatible Sputter Magnetron Sources ( A ) Cf-Based Flange Of Appropriate Size To Accommodate 2” Mag, Iit Delhi, Hauz Khas, New Delhi-Delhi

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Sl. No.	Item Description
1	Large area Sputter coating unit components
2	Ultra-High Vacuum Compatible Sputter Magnetron Sources (a) CF-based flange of appropriate size to accommodate 2” magnetron,
3	Ultra-High Vacuum Compatible Sputter Magnetron Sources (b) CF-based flange of appropriate size to accommodate 3” magnetron ,
4	Ultra-High Vacuum Compatible Sputter Magnetron Sources(c) CF-based cluster flange of appropriate size to accommodate 6” dia. magnetron sources
5	Gate Valves: (a) CF-63/2.5\" dia Flange size,
6	Gate Valves: (b) CF-100/4\" dia flange size,
7	Gate Valves: (c) CF-200/8\" dia flange size
8	Deposition chamber pressure measuring system
9	RF Generator and Matching Network of power rating ³1000 Watts @13.56 MHz
10	Pulsed DC Supplies of power rating ³750 W
11	3 Mass Flow Controllers
12	Turbo-molecular pump
13	Film thickness monitor
14	4-pocket and 4 cc electron beam evaporation source with Tetrode tube based power supply 6 kW and having digital sweep

Large Area Sputter Coating Unit Components Large Area Sputter Coating Unit Components , Large Area Sputter Coating Unit Components , Ultra-High Vacuum Compatible Sputter Magnetron Sources ( A ) Cf-Based Flange Of Appropriate Size To Accommodate 2” Mag, Iit Delhi, Hauz Khas, New Delhi-Delhi

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