THINFILM DEPOSITION SYSTEM\n(As per technical Specification)\n
Item 1
1
Nos
2
2
OPTIONAL ITEMS
3
2.1
OPTIONAL ITEMS (For e-beam)\n4CC/4 pocket ebeam source along with high voltage feed throughs, octal feed through and water feed through for ebeam. Pneumatic shutter for ebeam and 6KW power supply with sweep (Telemark, MDC or equivalent)\n\n\n
Item 2
1
Nos
4
2.2
Turbo pump (600 lit/sec) with dry backing pump (15 m3/hr) and Pirani gauge and Cold cathode gauge with display (Pfeiffer or similar) for ebeam chamber.
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