Electrical Industry, Generators, Electric Generator, Switches and Relay, Switch Supply, Scientific Instrument, Non Destructive Examination Equipment, Leak Testing Equipment, Light Wave Generating and Measuring Equipment, Function Generator, Chemical Oil a, DCMM, CONFERENCE HALL, RCI-Telangana

Supply Of Spares For Spts Drie System - 10 ( 10 ) ( 10 ) C ) Rf Test: The Rf Tests As Per Spts Standard Procedure Are Required To Be Carried Out To Ensure Proper Functioning Of Rf Sources And Corresponding Matching Units. 10 ( 11 ) ( 11 ) D ) Software Maintenance: I ) Database Test: The General Inspection Of Data Base And Graphics Utility Services Is Required To Be Checked. The Upgraded Software May Be Offered If Any. 10 ( 12 ) ( 12 ) E ) Interlock Test: The Performance Of The Spts Software Is Required To Be Checked As Per Requirement. 10 ( 13 ) ( 13 ) F ) The Following Processes Can Be Carried Out To Check The Overall Functionality Of The System. 10 ( 14 ) ( 14 ) Chamber Vacuum And Leak Test: Objective: To Check If The Chamber Attains Required Vacuum In A Given Time And To Check If The Chamber Leak Rate Is Within Accepted Limits. 10 ( 15 ) ( 15 ) Plasma Stability Test: Objective: To Demonstrate Stable Transitions Between Etch And Deposition Phases Without Plasma Blinks As Per Spts Qualification Document. 10 ( 16 ) ( 16 ) Wafer Temperature Test: Objective: To Ensure Correct Operation Of Substrate Temperature Control System And Wafer Temperature Less Than Or Equal To 77 Degree Centigrade. 10 ( 17 ) ( 17 ) Deposition Rate Test: Objective: To Achieve Uniform Polymer Deposition At The Expected Deposition Rate As Per Spts Qualification Document. 10 ( 18 ) ( 18 ) Standard Sf6 Etch Rate Test: Objective: To Attain Si Etch Rate Of The Expected Value, As Per Spts Qualification Document 10 ( 19 ) ( 19 ) Pulsing Compensation: Objective: To Set Up Pulse Generator To Achieve Required Pulse Duty Cycle. 10 ( 20 ) ( 20 ) Standard Silicon Trench Profile Test: Objective: To Confirm Basic Switched Ase Process Meets Expected Performance Level, As Per Spts Qualification Document. 10 ( 21 ) ( 21 ) G ) Documentation Of Maintenance: The Desired Value And Achieved Value For Each Test Carried Out Is To Be Recorded As Per Iso Format.

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