The Ruhr University Bochum Intends To Obtain A Glove Box For Applications In Nitrogen Or Argon Atmosphere With An Integrated Gas Cleaning Unit. The Glovebox Is To Be Used In The Research Laboratory Microelectronics For 2D Electronics For Wafer Substrates Up To 200 Mm Diameter In The Clean Room. The Clean Room Has Basic Equipment For The Processing Of 2D Electronics Systems On Si, Glasses And Flexible Substrates Up To 200 Mm As Well As For Si-Based Mems Preparation Of 100 Mm And 200 Mm Substrates. The Necessary Devices For Operation In The Glovebox Are Available. The Supply Of The Glove Box With Nitrogen Or Alternative Argon Gas Is Available.
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