Tenders Are Invited For Dry -Etching Equipment - 202501100951 Acquisition, Delivery, Installation And Commissioning Of A Reactive Ion Engraving System With Capacitive Coupling (Rie - Ccp) Using Fluorinated Gases
Tenders Are Invited For Dry -Etching Equipment - 202501100951 Acquisition, Delivery, Installation And Commissioning Of A Reactive Ion Engraving System With Capacitive Coupling (Rie - Ccp) Using Fluorinated Gases
Dry -Etching Equipment - 202501100951 Acquisition, Delivery, Installation And Commissioning Of A Reactive Ion Engraving System With Capacitive Coupling (Rie - Ccp) Using Fluorinated Gases. The Object Of This Market Concerns The Acquisition, Delivery And Commissioning Of Two Reactive Ion Engraving Devices By Plasma Of The Rie-Ccp Type Using Fluorinated Or Dioxygen Gases. One Of The Two Reactors Will Be Dedicated To The Exclusive Engraving Of The Sixny, Sio2 Materials And If With A Resin Mask (Called Rie_1), The Second Will Be Open To Engraving The Same Materials And Also Of All The Materials That Can Be Engraved By A Plasma Obtained From Fluorinated Or Dioxygen Gas (Called Rie_2).
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