GTR 69935301
Tenders Are Invited For An Electron Beam Deposition And Oxidation System For The Micronanotechnology Center (Cmi)
ICB — International Competitive Bid
Closed
Western Europe
Tender Information
GTR Reference
69935301
Tendering Authority
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Tender No
547813-2023
Financer Name
Self-Funded
Work Title
Tenders Are Invited For An Electron Beam Deposition And Oxidation System For The Micronanotechnology Center (Cmi)
Bid Type
ICB — International Competitive Bid
Country
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Geographical Region
Western Europe
Last Date of Bid Submission
17-10-2023
Closed
Work Detail
An Electron Beam Deposition And Oxidation System For The Micronanotechnology Center (Cmi). In 2023, Epfl Intends To Acquire An Electron Beam Deposition And Oxidation System For Its Center For Micronanotechnology (Cmi). The Equipment Will Be Dedicated To Cutting-Edge Research On Alalox Josephson Junctions For High-Coherence Superconducting Qubits And Resonators For Circuit Quantum Electrodynamics And Related Projects. Considering The Needs Of Epfl And The Specific Scientific Objectives Of Its Sqil, Hqc, Lpqm Laboratories, Emphasis Will Be Placed On The Following Areas Of Research: • Fabrication Of Superconducting Al Films On 4 Inch Wafers And 5 To 10 Mm Chips • Static And Dynamic Oxidation In The Sas Or A Dedicated Oxidation Chamber After Deposition Of The Metal Layers • Ion Source For Sample Preparation
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