Tenders are invited for Multifunctional Automatic Measuring Device For Measuring Layer Thicknesses And Alignment Accuracy In The Waferbonden

Contract Notice: Multifunctional Automatic Measuring Device For Measuring Layer Thicknesses And Alignment Accuracy In The Waferbonden Laboratory, Optical And Precision Equipments (Excl. Glasses) Short Description: The System Is Intended To Expand The 200 Mm Pilot Line For Temporary And Permanent Wafer Bonds In Order To Increase Process Quality And Stability In The Nanolab. The Following Measurement Tasks Are Absolutely Necessary. - Contactless, Non -Destructive Layer Thickness Measurement On 200 Mm Silicon Wafers From: O Full And Partially Area O Different Adhesives (Approx. 2 Müm & Approx. 30 Müm) O Silicon Thicknesses 10 - 800 Müm -Alignment Accuracy Of 200 Mm Silicon Wafers With Aluminum Aluminum And Oxide Oxide Bonds O X-Y Missalignment O Rotation Misalignment - Optical Control Of Edges And Structures On 200 Mm Silicon Wafers - Road Measurement Of Surfaces Of 200 Mm Silicon Wafers The Measuring Device Must Be Compatible With The Existing Processes Within The Waferbonding Pilot Line And The Existing Bicmos Pilot Line Of The Ihp, Since The Measurement Processes Are Part Of An Entire Process Chain. The Focus Is On The Use Of The Plants For Future Research Tasks, Some Of Which Can Be Mentioned Above, But In Some Cases Cannot Yet Be Estimated. The Systems Should Be Designed For 200Mm Bicmos Wafer And For The Existing Wafer Boxes. The System Is To Be Set Up And Operated In A Clean Room Of Iso Class 6 (Din Iso 14644-1). Accordingly, The System Must Meet All Requirements For This. The Existing Clean Room Area Is Very Limited. Therefore, The Footprint Of The System Must Not Exceed 1.70 M X 1.50 M (Service Area). The Tender Includes The Delivery Of The System Up To The Location. ? Deadline For Submission: 20221021 12:00 Type Of Buyer: Other Type Of Contract: Supplies Type Of Procedure: Open Procedure Regulation: European Union, With Participation By Gpa Countries Type Of Bid: Submission For All Lots Award Criteria: The Most Economic Tender [Disclaimer: The Above Text Is Machine Translated. For Accurate Information Kindly Refer The Original Document.] Tender Link : Https://Ted.Europa.Eu/Udl?Uri=Ted:Notice:518337-2022:Data:En:Html