Prior Information Notice For Miscellaneous Special-Purpose Machinery – Prior Information Notice – Maskless Laser Lithography System

Prior Information Notice For Miscellaneous Special-Purpose Machinery – Prior Information Notice – Maskless Laser Lithography System. The Ferdinand-Braun-Institut (Fbh) Plans To Procure A High-Performance Maskless Laser Lithography System Within The Framework Of The Eu-Funded Apecs Programme. The System Will Be Used For High-Resolution Patterning Of Semiconductor Wafers To Support The Development Of Advanced Heterointegration Technologies, Including Inp- And Gaas-Based Chiplets. It Is Intended To Enable Rapid Prototyping As Well As Efficient Processing Of Wafers With Diameters Up To 200 Mm. The Equipment Must Provide Sub-Micron Precision Combined With High Throughput And Support Modern Multi-Beam Laser Writing Technologies. It Will Be Installed In A Cleanroom Environment And Must Comply With Iso Class 5 Requirements. The Procurement Procedure Is Planned For 2026.