Tenders Are Invited For Miscellaneous Special-Purpose Machinery – Upgrade Of A 200 Mm Wxz Tungsten Cvd Chamber To Wxz Sprint Configuration

Miscellaneous Special-Purpose Machinery – Upgrade Of A 200 Mm Wxz Tungsten Cvd Chamber To Wxz Sprint Configuration. The Subject Of The Procurement Is The Upgrade Of An Existing 200 Mm Tungsten Cvd System From The Manufacturer Applied Materials Inc. (Amat) To A Wxz Sprint Configuration. This Requires The Delivery, Integration And Commissioning Of The Necessary Hardware And Software Components As Well As The Implementation Of All Necessary Adaptation, Testing And Qualification Measures. The Scope Of Services Includes In Particular The Modification Of The Gas Distribution System To Realize A Controlled Switching Of The Process Gases Wf6 And Sih4 Between The Exhaust Line And The Process Chamber To Support A Pulsed Tungsten Deposition Process For High Aspect Ratio Gap-Fill Applications. In Addition, Additional Hardware To Enable Deposition Pressures Of Up To 300 Torr Must Be Delivered And Integrated Into The Existing System. The Solution Offered Must Be Compatible With The Existing System Configuration And Ensure The Technical Functionality Of A Wxz Sprint Configuration. An On-Site Inspection Of The System Is Recommended To Determine The Specific Need For Adjustment.