Tenders Are Invited For Miscellaneous Special-Purpose Machinery – Ims Chips - Awarding Of A Coating And Development System For Wafers

Miscellaneous Special-Purpose Machinery – Ims Chips - Awarding Of A Coating And Development System For Wafers. The Institute For Microelectronics Stuttgart (Hereinafter Also Ims) Is A Non-Profit Foundation Under Civil Law And Part Of The Baden-Württemberg Innovation Alliance. The Ims Conducts Business-Oriented Research And Development In The Areas Of Silicon Technology, User-Specific Circuits (Asic), Nanostructuring, Gan Power Electronics, Photonics, Large-Area Mems And Image Sensors And Is Committed To Continuing Professional Development. The Tasks Of The Ims Include, Among Other Things, The Provision Of Infrastructure, Consulting, Research And Development Services In These Areas For Small And Medium-Sized Industries. The Subject Of This Award Procedure Is The Coating/Development System For Processing 150Mm And 200Mm Wafers With Alternating Photoresists For Iline And E-Beam Lithography. A Two-Year Full Maintenance Contract With An Uptime Guarantee Is Available As An Option. The Maximum Delivery Time Is 18 Months After The Award. The Aim Of This Coating/Development System Is To Develop Novel Processes And Process Sequences Within Publicly Funded Research Projects And Industry-Financed Development Projects As Well As To Realize Small And Pilot Series Production.