Tenders Are Invited For Laboratory, Optical And Precision Equipment (Excl. Glasses) – Delivery Free Of Charge To The Point Of Use, Assembly, Commissioning And Instruction Of A Confocal Sputtering System

Laboratory, Optical And Precision Equipment (Excl. Glasses) – Delivery Free Of Charge To The Point Of Use, Assembly, Commissioning And Instruction Of A Confocal Sputtering System. The Aim Is To Deliver A Cluster System For The Reproducible Deposition Of Thin Films Using Cathode Sputtering For Use In Microsystem Technology. A Fully Automated Sputtering Cluster System Is Therefore Required, Which Has A Lock Chamber With A Sample Magazine, A Transfer Chamber, A Heating Chamber And Two Process Chambers For Sputtering. Heating Systems For Temperature Control Of The Samples As Well As Optical Emission Spectrometers (Oes) Are Required In The Respective Process Chambers. The Required Layer Systems Differ In Two Categories: Reactively Sputtered Layers Such As Nitrides Or Oxides And Inertly Sputtered, High-Purity Metallic Layers. In Both Cases, The Co-Deposition Of Up To Four Different Source Materials Is Crucial For The Performance Of The Layers. A Confocal Arrangement Of The Targets Is Therefore Required. The Substrate Size Should Range From Chip Level Up To 200 Mm Wafers And The Samples Should Be Held On Rotatable Substrate Holders. The Sputter Cluster Is Set Up In A Class Iso 5 Clean Room, Which Is Why The System Must Be Delivered With Appropriate Compatibility And In A Clean Condition. In The Future, The System Should Be Expandable With A Compatible Ion Beam Etching System (Ibe). Particular Attention Is Also Paid To The Sustainability Goals Of Avoiding Waste, Minimizing Pollutants In Waste, Recycling Waste, Protecting Resources And Saving Energy And Water. In Addition To Delivery Free Of Charge To The Point Of Use Of The Main Device, The Scope Of Services Includes Assembly, Commissioning And Subsequent Acceptance Of The System And Instruction. The Desired Delivery Date Is July 1St, 2027. All Delivery Dates That Are Before July 1St, 2027 Will Be Given The Maximum Number Of Points. Delivery Dates Announced After That Will Be Evaluated In Descending Order Among All Offers Submitted. Please Note The Specified Maximum Price Of Eur 1,500,000.00 Gross Including All Additional Costs. All Prices Must Be Stated In Euros And Gross. The Contract Will Be Awarded To The Most Economical Offer. When Determining The Most Economically Advantageous Offer, The Criteria From The Attached List Of Services Are Applied. Exclusion Criteria Are Marked With The Letter A. Failure To Fulfill A Requirement Marked As An Exclusion Criterion Leads To The Exclusion Of The Offer (Ko Criterion). Evaluation Criteria Are Marked With The Letter B. The Requirements Marked With A B Represent The Criteria To Be Assessed With Points Within The Evaluation Scale And Are Given A Weighting. If Listed, 0 To 10 Points Are Awarded For Each Evaluation Criterion, Which Are Included In The Final Score With The Specified Weighting Factor. The Mandatory Information Field Must Be Filled Out Completely. If Fields Contain Yes/No, The Information That Is Offered Must Be Ticked Here. Be