Miscellaneous Special-Purpose Machinery – Process Monitoring Tool. Upgrade Of The Existing Process Monitoring System Mesc21-11 (Nanofocus Topography Measurement System Serial Number 700259) Located At Fraunhofer Ipms Cnt An Der Bartlake 5. Upgrade Cosists Of An Automatic Handling System For Wafers In A Seperately Enclosed Environment. The System Is Capable Of Handling Wafers From A Semi 300 Mm Foup To The Existing Measurement Tool. The System Is Also Able To Introduce 200 Mm Wafers Into A Suitable Adapter Enabling Processing On Standard 300 Mm Tools And Handle The 200 Mm Wafers In Adapter Into A Semi Standard 300 Mm Foup.
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