GTR 109293731
Tenders Are Invited For Miscellaneous General And Special-Purpose Machinery – Clustertool For Ion Beam Etching Of 300Mm Wafers
ICB — International Competitive Bid
Closed
Western Europe
Tender Information
GTR Reference
109293731
Tendering Authority
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Tender No
117594-2026
Financer Name
Self-Funded
Work Title
Tenders Are Invited For Miscellaneous General And Special-Purpose Machinery – Clustertool For Ion Beam Etching Of 300Mm Wafers
Bid Type
ICB — International Competitive Bid
Country
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Geographical Region
Western Europe
Political Region
European Union,G20
Last Date of Bid Submission
20-03-2026
Closed
Work Detail
Miscellaneous General And Special-Purpose Machinery – Clustertool For Ion Beam Etching Of 300Mm Wafers. The Tender Item Is An Ion Beam Etching Process Tool To Be Used For 300Mm Wafer Fabrication At The Fraunhofer Ipms. The Systems Will Be Used For The Processing Of Cmos Wafers In A Cleanroom Class 1000 (Approximately Class 6 En Iso 14644-1) Production Environment. Therefore, It Is Necessary To Fulfill Require-Ments Regarding Metal Contamination And Particle Generation Compatible With Industry Standards.
Key Value
Tender Value
Ref. Document
Tender Documents
Global Tender Document
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- Publication Document (Tender Document / Tender Notice)
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