Tenders Are Invited For Laboratory, Optical And Precision Equipment (Excl. Glasses) – Delivery, Assembly, Commissioning And Instruction Of A Lithography Cluster

Laboratory, Optical And Precision Equipment (Excl. Glasses) – Delivery, Assembly, Commissioning And Instruction Of A Lithography Cluster. As Part Of The Research Work In The Field Of Quantum Technologies, We Plan To Procure A Compact Lithography Cluster, Which In The Future Will Be Used As A Central Platform For The Production And Further Development Of Micro- And Nanostructured Samples Up To 8. The System Must Ensure A High Level Of Reproducibility, Flexibility And Process Reliability In Order To Map Proven Processes Under Constant Conditions And To Enable The Development Of New Processes. The Tender Includes Four Main Modules: - Automatic Spin Coating Module For Photoresists (Module 1) - Automatic Spray Coating Module For Photoresists (Module 2) - Automatic Development Module, Solvent-Based (Module 3) - Automatic Development And Cleaning Module, Water-Based (Module 4) In Addition, The Following Functional Modules Are Provided For Smooth Operation The Following Are Essential: Loading Station, Sample Handling Using Robots, Automatic Centering, The Automatic Application Of An Adhesion Promoter (E.G. Hmds) And Heating Plates For Pre- And Post-Treatment Of The Substrates. Of Particular Importance Is That The Entire System Is Designed As A Compact And Fully Integrated Solution, As The System Must Be Integrated Into An Existing Cleanroom With Limited Space. Short Changeover Times For Replacing Photoresists Or Developer Fluids, A User-Friendly User Interface, As Well As High Service And Spare Parts Availability Are Therefore An Integral Part Of Our Requirements. Particular Attention Is Also Paid To The Sustainability Goals Of Avoiding Waste, Minimizing Pollutants In Waste, Recycling Waste, Protecting Resources And Saving Energy And Water. In Addition To Delivery Free Of Charge To The Point Of Use Of The Main Device, The Scope Of Services Includes Assembly, Commissioning And Subsequent Acceptance Of The System And Instruction. The Desired Delivery Date Is December 1St, 2026. All Delivery Dates That Are Before December 1St, 2026 Will Be Given The Maximum Number Of Points. Delivery Dates Announced After This Will Be Evaluated In Descending Order Among All Offers Submitted. Please Note The Specified Maximum Price Of Eur 1,600,000.00 Gross Including All Additional Costs. The Contract Will Be Awarded To The Most Economical Offer. When Determining The Most Economically Advantageous Offer, The Criteria In The Attached List Of Services Are Applied. Exclusion Criteria Are Marked With The Letter A. Failure To Fulfill A Requirement Marked As An Exclusion Criterion Leads To The Exclusion Of The Offer (Ko Criterion). Evaluation Criteria Are Marked With The Letter B. The Requirements Marked With A B Represent The Criteria To Be Assessed With Points Within The Evaluation Scale And Are Given A Weighting. When Listed, Each Evaluation Criterion Will Be 0 To