Contract notice: Quick Annealing Furnace Equipment (Rtp) Microelectronic machinery and apparatus and microsystems Short Description: The CEA-Leti wants to acquire fast annealing furnace equipment as part of its activities research and development in microelectronics. The desired equipment will be capable of performing rapid heat resumes on silicon or III-V plates, ranging from the sample to the 200 and 300mm diameter plates. It will consist of a single reactor with manual charging by default. An optional configuration will include an automatic charging robot and a cooling station for 200 and 300mm diameter plates. The equipment will be able to advertise in the range of temperature 200 - 1200 C. The temperature ramps will be mounted and descent ramps typical of those of an RTP, with heating / cooling values of 10 C / min at 100 C / S. The durations of the bearings will be a 1S (spike) at 5minutes. Deadline for Submission: 20220418 12:00 Type of Buyer: Body governed by public law Type of Contract: Supplies Type of Procedure: Open procedure Regulation: European Union, with participation by GPA countries Type of Bid: Submission for all lots Award Criteria: The most economic tender [Disclaimer: The above text is machine translated. For accurate information kindly refer the original document.]
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