Appointment Of Works Contractor For The Refurbishment Of Block A E Beam Clean Room At The Tyndall National Institute Ucc The Project Is To Refurbish An E Beam Laboratory Clean Room Area In The Tyndall National Institute To Facilitate The Installation Of New Equipment Which Is Due To Be Delivered In Q2 2019 The Els G100 Electron Beam And All Associated Equipment Will Be Accommodated In The Current E Beam Location The Area Will Provide Facilities For The New E Beam Tool And Ancillary Equipment The Els G100 Will Be Supplied By Elionix Http Www Sts Elionix Com Node 23 The E Beam Room Is Located In Block A Room G 02 Directly Adjacent To A Public Corridor With A Confined Footprint The Area Will Also Provide For Sample Wafer Preparation Involving A Spin Coating Electron Beam Sensitive Resist Materials Using Existing Tooling B Resist Curing And Development Requires A Wet Bench Fume Hood Hotplates C Cold Development Station Floor Mounted Existing The Area Will Also Require Bench Space For D Loading And Unloading Of Wafers On To The Electron Beam To Sample Holder E Optical Inspection And Basic Metrology They Will Also Install A Client Issued New Ahu To Supply The Clean Room In A Plant Room Off Of The Main Boiler House In Tni And Above An Existing Fab Facility They Will Also Be Required To Complete The Following Works All Shutdowns And Isolations Of Exiting Services Construction Of The New Lab In Advance Of Els G100 Delivery Installation Of A New Ahu Dehumidifier And All Associated Ductwork And Equipment Decommissioning Of The Old Ahu Demolitions And Enabling WorksCompletion Of The Clean Room And All Services Post Delivery Commissioning And Testing Of The Clean Room Br
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